Resolving Difficult Multilayer Film Structure by Transmission Electron Microscopy
نویسندگان
چکیده
منابع مشابه
Thin dielectric film thickness determination by advanced transmission electron microscopy.
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2016
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s143192761601045x